ROKI TECHNO CO.,LTD.

Ozone generator & Ozone system lineup

  • Ozone generator & Ozone system lineup
  • Explanation of ozone
  • Main example of ozone use
  • Support for plant engineering
  • オゾン関連製品検討書フォーム

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Please refer to the catalog for the details

Ozone generator / ozone generation system

Semi-conductor/fine chemical FA type series

Semi-conductor/fine chemical FA type series

Structure, features

Our FA type ozone generators adopt the quartz glass double tube system for their discharge section. Since there is no metal component, the ozone gas discharged is so clean that it is below the lower limit measured by an analyzer.

Heavy metal ion analysis data (when ozone concentration is 200g/m (N))
Element Al Ti Cr Mn Fe Co Ni Cu Zn
Measured value <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <0.5

- Analysis maker ICP-MS detectable lower limit 1.0ng/m3


Ozone generator BA series air specifications

Ozone generator BA series air specifications

Structure, features

Ozone generators of water-cooling type using air as the raw material gas, designed for general industrial use. Highly reliable thanks to the high grade discharge tube adopted. The protection system has been strengthened by adopting an LCD touch panel in addition to various alarm systems. Remote operation and interaction with an optional concentration meter, etc. makes the feedback control possible.

Ozone quantity generated 80~1300 g/Hr
Ozone gas concentration 25~45 g/Nm3

Ozone generator BX series oxygen specifications

Ozone generator BX series oxygen specifications

Structure, features

Water-cooling ozone generators based on the BA type but using oxygen as the raw material gas. By using oxygen as the raw material gas, the concentration of the ozone generated is twice the BA type of the same size.

Ozone quantity generated 160~2600 g/Hr
Ozone gas concentration 50~120 g/Nm3

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Ozone generators for experimentation

Ozone generator FAS series

Ozone generator FAS series

Structure, features

Capable of supplying high concentration ozone gas such as 180g/Nm3 using oxygen gas as the raw material gas. Ozone generators of water-cooling type adopting a small quartz double tube.


Ozone generator ZR series

Ozone generator NZR series

Structure, features

Ozone generators of air-cooling type having a ceramic plane discharge section. Capable of supplying ozone gas as much as 3 to 6g/Hr using oxygen gas as the raw material gas.

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オゾン水製造機

Ozone water production system for general industry, ZW series(Ozex water)

Ozone water production system for general industry, ZW series

Structure, features

Gas dissolution component is incorporated into the ozone gas generator to produce ozone water. The units are combined according to the required ozone water concentration (1 to 20ppm) and the ozone water flow rate. The dissolution method is selected from ejector, gas dissolution pump, gas dissolution film, etc. according to the specifications required.

Ozone water concentration 1 – 20ppm
Ozone water flow rate 5 – 200 L/min

半導体産業向けオゾン水製造装置 FZWシリーズ(オゼックス・ウォーター)

Ozone water production system for semiconductor industry, DW series

Structure, features

By dissolving clean ozone gas generated by the quartz double tube into ultra pure water, clean ozone water is made. To dissolve the ozone gas, an ejector (up to 20ppm) or gas dissolution film (20ppm or more) is used.

Ozone water concentration 5 – 90ppm
Ozone water flow rate 2 – 40 L/min

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Ozone concentration meter ZM-Ozone monitor

Ozone concentration meter OZT

Structure, features

This ozone monitor read the ozone concentration directly and continually using ozone property of absorbing specific wave length by ultra violet.

Model OZT-50/100/150/200/300
Measurement range 0~300g/m3(N)

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オゾンガス分解装置

This system decomposes the ozone gas and discharges it as oxygen gas. It doesn’t use electricity, etc. because it uses ozone decomposition catalyst or active charcoal. It is designed according to the concentration and air flow rate of the ozone gas discharged. The ozone gas of concentration 200g/Nm3 or less is made 0.1ppm and discharged.

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オゾン発生器メンテナンス

We provide maintenance, overhaul and modification service not only for ozone generators made by ROKI TECHNO but also for those made by former Japan Ozone Co., Ltd. We also started to provide maintenance service for ozone generators made by Japan Electronic Materials Corp. Please feel free to contact us for more information.

オゾン発生器メンテナンス  オゾン発生器メンテナンス

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オゾン脱臭システム

オゾン脱臭システム

Ozone deodorization can be used as an effective way of deodorization. We propose a total deodorization plant using the ozone according to customer’s conditions. Our proposal covers from planning of the plant, production of vessel to construction of ducts.

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その他オゾン処理システム

In addition to the deodorization systems above, we also provide designing and production of various ozone systems including depolarization of waste water and ozonization of factory water. Please feel free to contact us for more information.

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